KEY FEATURES:

‹ INCREASES PROCESS THROUGHPUT
with innovative, dynamically optimized
design
‹ Provides superior dynamic accuracy &
IMPROVES PROCESS YIELD with highresolution
feedback
‹ E NHANCES THERMAL STABILITY with
optional air & water cooling
‹ O FFERS SYSTEM DESIGN FLEXIBILITY
with a multitude of optical configurations
‹ Synchronizes easily with other motion axes,
offering SEAMLESS INTEGRATION &
EASE OF USE