MPX5100

Rev 10, 05/2005

Freescale Semiconductor

Technical Data

© Freescale Semiconductor, Inc., 2005. All rights reserved.

Integrated Silicon Pressure Sensor

On-Chip Signal Conditioned,

Temperature Compensated, and

Calibrated

The MPX5100 series piezoresistive transducer is a state-of-the-art monolithic

silicon pressure sensor designed for a wide range of applications, but particularly

those employing a microcontroller or microprocessor with A/D inputs. This

patented, single element transducer combines advanced micromachining

techniques, thin-film metallization, and bipolar processing to provide an accurate,

high level analog output signal that is proportional to the applied pressure.

Features

•

2.5% Maximum Error over 0

° to 85°C

•

Ideally suited for Microprocessor or Microcontroller-Based Systems

•

Patented Silicon Shear Stress Strain Gauge

•

Available in Absolute, Differential and Gauge Configurations

•

Durable Epoxy Unibody Element

•

Easy-to-Use Chip Carrier Option

Typical Applications

•

Patient Monitoring

•

Process Control

•

Pump/Motor Control

•

Pressure

S

witching

ORDERING INFORMATION

Device

Type

Options

Case

No.

MPX Series Order

Number

Device Marking

UNIBODY PACKAGE (MPX5100 SERIES)

Basic

Elements

Absolute

867

MPX5100A

MPX5100A

Differential

867

MPX5100D

MPX5100D

Ported

Elements

Differential Dual Ports

867C

MPX5100DP

MPX5100DP

Absolute, Single Port

867B

MPX5100AP

MPX5100AP

Gauge, Single Port

867B

MPX5100GP

MPX5100GP

Gauge, Axial PC Mount

867F

MPX5100GSX

MPX5100D

Gauge, Axial Port, SMT

482A

MPXV5100GC6U

MPXV5100G

Gauge, Axial Port, DIP

482C

MPX5V100GC7U

MPXV5100G

Gauge, Dual Port, SMT

1351

MPXV5100DP

MPXV5100

MPX5100/MPXV5100

SERIES

INTEGRATED PRESSURE SENSOR

0 to 100 kpa (0 to 14.5 psi)

15 to 115 kPa

(2.2 to 16.7 psi)

0.2 to 4.7 V Output

1. Pins 1, 5, 6, 7, and 8 are internal device

connections. Do not connect to external

circuitry or ground. Pin1 is noted by the

notch in the lead.

1

N/C

5

N/C

2

6

N/C

3

GND

7

N/C

4

8

N/C

1. Pins 4, 5, and 6 are internal device

connections. Do not connect to external

circuitry or ground. Pin 1 is noted by the

notch in the lead.

1

4

N/C

2

GND

5

N/C

3

6

N/C

SMALL OUTLINE PACKAGES

MPXV5100GC6U

CASE 482A-01

MPXV5100GC7U

CASE 482C-03

MPXV5100DP

CASE 1351-01

UNIBODY PACKAGES

MPX5100A/D

CASE 867-08

MPX5100AP/GP

CASE 867B-04

MPX5100DP

CASE 867C-05

MPX5100GSX

CASE 867F-03