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PRO560LM Datasheet(PDF) 5 Page - AEROTECH US. ALL RIGHTS RESERVED. |
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PRO560LM Datasheet(HTML) 5 Page - AEROTECH US. ALL RIGHTS RESERVED. |
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5 / 7 page ![]() aerotech.com PRO560LM SPECIFICATIONS Measurement data showing successful compensation of thermal related positioning errors at several temperatures using the ThermoComp feature. Results are typical of stage performance with and without ThermoComp. Cantilevered load capability of the PRO560LM. |
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