aerotech.com

PRO560SL SPECIFICATIONS

Electrical Specifications

Drive System

Brushless Linear Servomotor

Feedback (Rotary Encoder)(1)

Incremental – 1000 lines/rev (1 Vpp) and 2500 lines/rev (TTL)

Maximum Bus Voltage

340 VDC

Limit Switches

5 V, Normally-Closed

Notes:

1. Certified with -PL1/-PL2 options.

2. Achieved with Aerotech rotary motor with amplified sine encoder.

3. Achieved with Aerotech rotary motor with 2500 cnts/rev digital encoder.

4. Requires the selection of an appropriate amplifier with sufficient voltage and current.

5. Axis-orientation for on-axis loading is listed.

6. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent.

Contact factory for multi-axis applications.

1. Requires the selection of a motor option.

Mechanical Specifications

PRO560SL

Travel

300

400

500

600

800

1000

Accuracy(1)

Standard

±9.5 µm

±11 µm

±13 µm

±15 µm

±17 µm

±18 µm

Calibrated

±1.5 µm

±1.5 µm

±2 µm

±2 µm

±2.5 µm

±3 µm

Resolution (Min. Incremental Motion)

0.1 µm(2); 1.0 µm(3)

Bidirectional Repeatability(1)

±1 µm

Hortizontal Straightness(1)

±3 µm

±4 µm

±5 µm

±6 µm

±7 µm

±8.5 µm

Vertical Straightness(1)

±3µm

±4 µm

±5 µm

±6 µm

±7 µm

±8.5 µm

Pitch

49 µrad

60 µrad

70 µrad

78 µrad

90 µrad

110 µrad

Roll

39 µrad

44 µrad

53 µrad

58 µrad

73 µrad

87 µrad

Yaw

49 µrad

60 µrad

70 µrad

78 µrad

90 µrad

110 µrad

Maximum Speed(4)

220 mm/s

140 mm/s

Maximum Acceleration(4)

Function of Motor, Amplifier Selection, Payload, and Maximum Axial Load

Load Capacity(5)

Horizontal

150 kg

Vertical (Axial)

70 kg

Side

150 kg

Moving Mass (w/ Tabletop)

24.6 kg

Stage Mass (No Motor)

63.7 kg

68.6 kg

73.5 kg

78.4 kg

88.2 kg

98.0 kg

Material

Anodized Aluminum

MTBF (Mean Time Between Failure)

20,000 Hours