F3M-S

F3M-S

3

Specifications

J

RATINGS/CHARACTERISTICS

Part number

F3M-S625

F3M-S626

F3M-S825

F3M-S826

F3M-S1213

F3M-S1225

Sensing object

6-inch (5-inch) semiconductor

silicon wafers and transparent

wafers (with transparency of

92% max.) (See Note.)

8-inch semiconductor silicon

wafers and transparent wafers

(with transparency of 92% max.)

(See Note.)

12-inch semiconductor silicon

wafers and 12-inch SIC wafers

(with transparency of 30% max.)

Number of channels

25

26

25

26

13

25

Optical axis pitch

4.76 mm

6.35 mm

10 mm

Optical axis width

1.5 mm

Light source

Infrared LED (940 nm)

Power supply voltage

12 to 24 VDC ±10%, ripple (p-p): 10% max.

Current consumption

120 mA max.

Output

Control

output

Load power supply voltage: 30 VDC

Load current: 20 mA max. (residual voltage: 1 V max.)

Inflow current: 20 mA

Parallel output from all channels, NPN open collector

Dark-ON operation

Answer-back

output

When remote teaching is ON, pin 28 will be used for this function.

Self-

diagnostic

output

Load power

supply voltage:

30 VDC max.

Load current:

20 mA max.

(Residual

voltage: 1 V

max.)

Inflow current:

20 mA

NPN open

collector

---

Load power

supply voltage:

30 VDC max.

Load current:

20 mA max.

(Residual

voltage: 1 V

max.)

Inflow current:

20 mA

NPN open

collector

---

Load power supply voltage:

30 VDC max.

Load current: 20 mA max.

(Residual voltage: 1 V max.)

Inflow current: 20 mA

NPN open collector

Indicators

Power

Green indicator is ON when power is being supplied.

Warning

Red indicator is ON under the following conditions:

Teaching, no sensing object, insufficient light, or error.

Response time

10 ms max.

Control output interrupt input All outputs interrupted: GND and control output interrupt input terminals are short-circuited and 0-V

short-circuit current is 1 mA max.

Output interrupt reset: GND and control output interrupt input terminals are opened or the voltage is

between 9 V and the working power supply voltage.

Remote

ON

GND and remote input terminals are short-circuited and 0-V short-circuit current is 1 mA max.

Remote

teaching

input

OFF

GND and remote input terminals are opened or the voltage is between 9 V and the working power

supply voltage.

Teaching check function

Orange LED indicator

Ambient

temperature

Operating

0°Cto 40°C(32°F to 104°F) with no icing or condensation

0°Cto 55°C(32°F to 131°F)

with no icing or condensation

p

Storage

--25°Cto 60°C(--13°F to 140°F)

--25°Cto 60°C(--13°F to 140°F)

Relative humidity

35% to 85% with no condensation

Ambient illumination

Fluorescent lamp: 1,500 ℓxmax.

Noise resistance

Power supply line: ±480 V in normal mode with noise simulator

Noise resistance

Static electrical noise: No malfunction or destruction at ±8kV

Vibration resistance

10 to 55 Hz, 0.5-mm double amplitude for 2 hrs each in X, Y, and Z axes

Shock resistance

Degree of protection

IEC60529 IP40

Connection

Preleaded cable (standard cable length: 100 mm)

Connector

(This table continues on the next page.)