www.sensirion.com

Version 2 – February 2014

2/7

1. Sensor Performance

1.1

Parameter

Condition

Value

Unit

Flow Ranges

Update Time

14 bit

0.5

ms

Max.

Typ.

span

offset

±2.5

± 0.1

±1.5

± 0.05

slm

span

offset

±1

± 0.05

±0.5

± 0.02

% m.v.

slm

span

offset

±1

± 0.1

±0.5

± 0.05

% m.v.

slm

Accuracy Shift Due to

span

offset

± 0.75

± 0.0

± 0.25

± 0.0

% m.v./10°C

slm

non-horizontal position

< 0.05

slm

Pressure Drop

@60slm

@200slm

< 100 / < 0.4

< 600 / < 2.4

1.2

Media compatibility

Parameter

Value

Media Compatibility

Wetted Materials

PPE+PS blend (Noryl HN731SE, medical grade: biocompatible; ISO 10993 or USP

steel (DIN 1.4301/AISI 304, annealed),

RoHS, REACH, WEEE

RoHS, REACH and WEEE compliant

1.3

Ambient conditions

Parameter

Condition

Value

Unit

Calibrated Temperature Range

15-95% rel. hum. (non cond.)

-20 … +85

°C

Operating Temperature Range

15-95% rel. hum. (non cond.)

-40 … +85

°C

Storage Temperature

10-95% rel. hum. (non cond.)

-40 … +85

°C

Operating Pressure Range

absolute

0.7 – 1.3

bar

Burst Overpressure

gauge

> 1

bar

1

Unless otherwise noted, all sensor specifications are valid at 25°C with Vdd = 5V and absolute pressure = 966 mbar.

2

Optional calibration up to ±300 slm range is available for large volume projects

3

In standard liter per minute at 20°C and 1013 mbar

4

With ideal inlet and outlet conditions, at VDD = 5V, 25°C, absolute pressure = 966 mbar

5

Including offset, non-linearity, hysteresis

6

Sensor position horizontal (see Section 4.1)

7

Span or offset value, whichever is larger

8

In % of measured value (m.v.) = of rate = of reading

9

Shift due to temperature variation compared to calibration temperature

10

See Section 4.1

11

Contact Sensirion for information about other gases, wider calibrated temperature ranges and higher storage temperatures.