www.sensirion.com

Version 1.3 – January 2013

2/9

1. Sensor Performance

1.1

Physical specifications

SFM4100

Measurement range

Calibration available

Resolution

12 bits preset

(for 9–16 bits see documentation)

0.03 slm

0.15% of full scale or 3% of reading,

whichever is bigger

Span repeatability

0.25% of reading or 5 sccm whichever

is bigger

Offset shift due to

temperature variation

2 sccm / °C

Span shift due to

temperature variation

< 0.1% of reading per °C

Offset stability

< 0.01 slm/year

Pressure drop at full

flow

<25mbar

Response time

4.6 ms @ 12-bit resolution

(See documentation for response times with

other resolutions, e.g. 1.3 ms with 10 bits)

Warm-up time for first

reliable measurement

Max. 500ms

in general 50 ms

1

Unless otherwise noted, all sensor specifications are at 23°C and

absolute pressure = 4,8 bar.

2

Reference conditions for standard liters per minute slm: 20°C,

1013mbar; sccm denotes standard cubic centimeters per minute

3

includes repeatability and hysteresis.

4

The zero-point accuracy and span accuracy are independent

uncertainties and add according to the principles of error propagation.

1.2

Ambient conditions

Parameter

SFM4100 Series

Noncorrosive gases and gas

mixtures

Limited media compatibility

0 °C to +50 °C

Operating temperature

-20 °C to +80 °C

-40 °C to +80 °C

Operating Pressure Range

0-6 bar gauge

Position sensitivity

Use flow horizontally, electronic

connector up

5

Contact Sensirion for information about other gases, wider calibrated

temperature ranges and higher storage temperatures.

6

For a limited time period, depending on chemical. Not recommended.

1.3

Materials

Parameter

SFM4100 Series

Wetted materials Si, Si

3

N

4

, SiOx, Gold, Viton

12, Stainless Steel, Nickel Plated Brass,

Nylon, Nitrile, coated Aluminium,

Oxygenoex

RoHS

fully RoHS compliant

2. Electrical Specifications

2.1

Power supply

The SFM4100 series sensors require a supply voltage

(VDD) between 3.5V and 9 V. For the power supply of the

level shifter (VLS) a voltage between 2.9V and 5.5V is

required. Please be aware that the VLS must be the same

as the voltage of SCK.

2.2

Electrical characteristics

Parameter

SFM4100

Supply voltage

3.5 – 9.0 VDD

2.9 -5.5 VLS

Current drain

< 12.5 mA typical in operation

Interface

Bus clock frequency

SCL: 100 kHz typical

per gas type

Air:

1 (0000001)

2 (0000010)

3 (0000011)

4 (0000100)

Ar:

5 (0000101)

Flow output signal

Flow in sccm = value received

 1

Flow in slm = value received / 1000

7

Same voltage as the communication level of the

P is required.